4/11/2011	2:46:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2011	2:46:36 PM	Recipe started at 2:46 PM
4/11/2011	2:46:36 PM	H2 valve closed
4/11/2011	2:46:36 PM	BCl3 valve closed
4/11/2011	2:46:36 PM	PH3 valve closed
4/11/2011	2:46:36 PM	SiCl4 pre valve closed
4/11/2011	2:46:36 PM	SiCl4 post valve closed
4/11/2011	2:46:36 PM	Main Vac valve closed
4/11/2011	2:46:36 PM	Bypass valve closed
4/11/2011	2:46:36 PM	Bubbler valve closed
4/11/2011	2:46:36 PM	Helium valve opened
4/11/2011	2:46:36 PM	Helium MFC set to  500.000000
4/11/2011	2:46:36 PM	H2 MFC set to  0.000000
4/11/2011	2:46:36 PM	BCl3 MFC set to  0.000000
4/11/2011	2:46:36 PM	PHl3 MFC set to  0.000000
4/11/2011	2:46:36 PM	SiCl4 MFC set to  0.000000
4/11/2011	2:46:36 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	2:46:36 PM	Tube furnace set to 0
4/11/2011	2:47:57 PM	Helium valve closed
4/11/2011	2:47:57 PM	H2 valve closed
4/11/2011	2:47:57 PM	BCl3 valve closed
4/11/2011	2:47:57 PM	PH3 valve closed
4/11/2011	2:47:57 PM	SiCl4 pre valve closed
4/11/2011	2:47:57 PM	SiCl4 post valve closed
4/11/2011	2:47:57 PM	Main Vac valve closed
4/11/2011	2:47:57 PM	Bypass valve closed
4/11/2011	2:47:57 PM	Bubbler valve closed
4/11/2011	2:47:57 PM	Helium MFC set to  0.000000
4/11/2011	2:47:57 PM	H2 MFC set to  0.000000
4/11/2011	2:47:57 PM	BCl3 MFC set to  0.000000
4/11/2011	2:47:57 PM	PHl3 MFC set to  0.000000
4/11/2011	2:47:57 PM	SiCl4 MFC set to  0.000000
4/11/2011	2:47:57 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	2:47:58 PM	Tube furnace set to 0
4/11/2011	2:47:58 PM	Run finished at 2:47 PM
4/11/2011	2:47:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2011	2:58:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2011	2:58:33 PM	Recipe started at 2:58 PM
4/11/2011	2:58:33 PM	Helium valve closed
4/11/2011	2:58:33 PM	H2 valve closed
4/11/2011	2:58:33 PM	BCl3 valve closed
4/11/2011	2:58:33 PM	PH3 valve closed
4/11/2011	2:58:33 PM	SiCl4 pre valve closed
4/11/2011	2:58:33 PM	SiCl4 post valve closed
4/11/2011	2:58:33 PM	Main Vac valve closed
4/11/2011	2:58:33 PM	Bubbler valve closed
4/11/2011	2:58:33 PM	Bypass valve opened
4/11/2011	2:58:33 PM	Helium MFC set to  0.000000
4/11/2011	2:58:33 PM	H2 MFC set to  0.000000
4/11/2011	2:58:33 PM	BCl3 MFC set to  0.000000
4/11/2011	2:58:33 PM	PHl3 MFC set to  0.000000
4/11/2011	2:58:33 PM	SiCl4 MFC set to  0.000000
4/11/2011	2:58:33 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	2:58:33 PM	Tube furnace set to 0
4/11/2011	2:59:05 PM	Helium valve closed
4/11/2011	2:59:05 PM	H2 valve closed
4/11/2011	2:59:05 PM	BCl3 valve closed
4/11/2011	2:59:05 PM	PH3 valve closed
4/11/2011	2:59:05 PM	SiCl4 pre valve closed
4/11/2011	2:59:05 PM	SiCl4 post valve closed
4/11/2011	2:59:05 PM	Bubbler valve closed
4/11/2011	2:59:05 PM	Main Vac valve opened
4/11/2011	2:59:05 PM	Bypass valve opened
4/11/2011	2:59:05 PM	Helium MFC set to  0.000000
4/11/2011	2:59:05 PM	H2 MFC set to  0.000000
4/11/2011	2:59:05 PM	BCl3 MFC set to  0.000000
4/11/2011	2:59:05 PM	PHl3 MFC set to  0.000000
4/11/2011	2:59:05 PM	SiCl4 MFC set to  0.000000
4/11/2011	2:59:05 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	2:59:05 PM	Tube furnace set to 0
4/11/2011	2:59:06 PM	Run finished at 2:59 PM
4/11/2011	2:59:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2011	3:00:55 PM	Bypass valve closed
4/11/2011	3:00:56 PM	Main Vac valve closed
4/11/2011	3:01:02 PM	Bypass valve opened
4/11/2011	3:01:03 PM	Main Vac valve opened
4/11/2011	3:01:04 PM	Helium valve opened
4/11/2011	3:01:06 PM	Helium MFC set to  100.000000
4/11/2011	3:01:48 PM	Helium valve closed
4/11/2011	3:02:19 PM	Helium MFC set to  1.000000
4/11/2011	3:02:20 PM	Helium valve opened
4/11/2011	3:03:00 PM	Helium valve closed
4/11/2011	3:03:15 PM	Helium MFC set to  10.000000
4/11/2011	3:03:16 PM	Helium valve opened
4/11/2011	3:03:43 PM	Helium valve closed
4/11/2011	3:03:48 PM	Helium MFC set to  0.000000
4/11/2011	3:04:27 PM	Recipe started at 3:04 PM
4/11/2011	3:04:27 PM	BCl3 valve closed
4/11/2011	3:04:27 PM	PH3 valve closed
4/11/2011	3:04:27 PM	SiCl4 pre valve closed
4/11/2011	3:04:27 PM	SiCl4 post valve closed
4/11/2011	3:04:27 PM	Main Vac valve closed
4/11/2011	3:04:27 PM	Bypass valve closed
4/11/2011	3:04:27 PM	Bubbler valve closed
4/11/2011	3:04:27 PM	Helium valve opened
4/11/2011	3:04:27 PM	H2 valve opened
4/11/2011	3:04:27 PM	Helium MFC set to  380.000000
4/11/2011	3:04:27 PM	H2 MFC set to  20.000000
4/11/2011	3:04:27 PM	BCl3 MFC set to  0.000000
4/11/2011	3:04:27 PM	PHl3 MFC set to  0.000000
4/11/2011	3:04:27 PM	SiCl4 MFC set to  0.000000
4/11/2011	3:04:27 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	3:04:27 PM	Tube furnace set to 0
4/11/2011	3:06:11 PM	BCl3 valve closed
4/11/2011	3:06:11 PM	PH3 valve closed
4/11/2011	3:06:11 PM	SiCl4 pre valve closed
4/11/2011	3:06:11 PM	SiCl4 post valve closed
4/11/2011	3:06:11 PM	Main Vac valve closed
4/11/2011	3:06:11 PM	Bypass valve closed
4/11/2011	3:06:11 PM	Helium valve opened
4/11/2011	3:06:11 PM	H2 valve opened
4/11/2011	3:06:11 PM	Bubbler valve opened
4/11/2011	3:06:11 PM	Helium MFC set to  47.500000
4/11/2011	3:06:11 PM	H2 MFC set to  2.500000
4/11/2011	3:06:11 PM	BCl3 MFC set to  0.000000
4/11/2011	3:06:11 PM	PHl3 MFC set to  0.000000
4/11/2011	3:06:11 PM	SiCl4 MFC set to  0.000000
4/11/2011	3:06:11 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	3:06:12 PM	Tube furnace set to 350
4/11/2011	11:06:12 PM	Helium valve closed
4/11/2011	11:06:12 PM	H2 valve closed
4/11/2011	11:06:12 PM	BCl3 valve closed
4/11/2011	11:06:12 PM	PH3 valve closed
4/11/2011	11:06:12 PM	SiCl4 pre valve closed
4/11/2011	11:06:12 PM	SiCl4 post valve closed
4/11/2011	11:06:12 PM	Main Vac valve closed
4/11/2011	11:06:12 PM	Bypass valve closed
4/11/2011	11:06:12 PM	Bubbler valve closed
4/11/2011	11:06:12 PM	Helium MFC set to  0.000000
4/11/2011	11:06:12 PM	H2 MFC set to  0.000000
4/11/2011	11:06:12 PM	BCl3 MFC set to  0.000000
4/11/2011	11:06:12 PM	PHl3 MFC set to  0.000000
4/11/2011	11:06:12 PM	SiCl4 MFC set to  0.000000
4/11/2011	11:06:12 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	11:06:12 PM	Tube furnace set to 0
4/11/2011	11:06:12 PM	Run finished at 11:06 PM
4/11/2011	11:23:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2011	11:23:49 PM	Recipe started at 11:23 PM
4/11/2011	11:23:49 PM	H2 valve closed
4/11/2011	11:23:49 PM	BCl3 valve closed
4/11/2011	11:23:49 PM	PH3 valve closed
4/11/2011	11:23:49 PM	SiCl4 pre valve closed
4/11/2011	11:23:49 PM	SiCl4 post valve closed
4/11/2011	11:23:49 PM	Main Vac valve closed
4/11/2011	11:23:49 PM	Bypass valve closed
4/11/2011	11:23:49 PM	Bubbler valve closed
4/11/2011	11:23:49 PM	Helium valve opened
4/11/2011	11:23:49 PM	Helium MFC set to  500.000000
4/11/2011	11:23:49 PM	H2 MFC set to  0.000000
4/11/2011	11:23:49 PM	BCl3 MFC set to  0.000000
4/11/2011	11:23:49 PM	PHl3 MFC set to  0.000000
4/11/2011	11:23:49 PM	SiCl4 MFC set to  0.000000
4/11/2011	11:23:49 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	11:23:50 PM	Tube furnace set to 0
4/11/2011	11:23:55 PM	Helium valve closed
4/11/2011	11:23:55 PM	H2 valve closed
4/11/2011	11:23:55 PM	BCl3 valve closed
4/11/2011	11:23:55 PM	PH3 valve closed
4/11/2011	11:23:55 PM	SiCl4 pre valve closed
4/11/2011	11:23:55 PM	SiCl4 post valve closed
4/11/2011	11:23:55 PM	Main Vac valve closed
4/11/2011	11:23:55 PM	Bypass valve closed
4/11/2011	11:23:55 PM	Bubbler valve closed
4/11/2011	11:23:55 PM	Helium MFC set to  0.000000
4/11/2011	11:23:55 PM	H2 MFC set to  0.000000
4/11/2011	11:23:55 PM	BCl3 MFC set to  0.000000
4/11/2011	11:23:55 PM	PHl3 MFC set to  0.000000
4/11/2011	11:23:55 PM	SiCl4 MFC set to  0.000000
4/11/2011	11:23:55 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	11:23:55 PM	Tube furnace set to 0
4/11/2011	11:23:56 PM	Run finished at 11:23 PM
4/11/2011	11:23:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/11/2011	11:24:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/11/2011	11:24:56 PM	Recipe started at 11:24 PM
4/11/2011	11:24:56 PM	Helium valve closed
4/11/2011	11:24:56 PM	H2 valve closed
4/11/2011	11:24:56 PM	BCl3 valve closed
4/11/2011	11:24:56 PM	PH3 valve closed
4/11/2011	11:24:56 PM	SiCl4 pre valve closed
4/11/2011	11:24:56 PM	SiCl4 post valve closed
4/11/2011	11:24:56 PM	Main Vac valve closed
4/11/2011	11:24:56 PM	Bubbler valve closed
4/11/2011	11:24:56 PM	Bypass valve opened
4/11/2011	11:24:56 PM	Helium MFC set to  0.000000
4/11/2011	11:24:56 PM	H2 MFC set to  0.000000
4/11/2011	11:24:56 PM	BCl3 MFC set to  0.000000
4/11/2011	11:24:56 PM	PHl3 MFC set to  0.000000
4/11/2011	11:24:56 PM	SiCl4 MFC set to  0.000000
4/11/2011	11:24:56 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	11:24:56 PM	Tube furnace set to 0
4/11/2011	11:25:26 PM	Helium valve closed
4/11/2011	11:25:26 PM	H2 valve closed
4/11/2011	11:25:26 PM	BCl3 valve closed
4/11/2011	11:25:26 PM	PH3 valve closed
4/11/2011	11:25:26 PM	SiCl4 pre valve closed
4/11/2011	11:25:26 PM	SiCl4 post valve closed
4/11/2011	11:25:26 PM	Bubbler valve closed
4/11/2011	11:25:26 PM	Main Vac valve opened
4/11/2011	11:25:26 PM	Bypass valve opened
4/11/2011	11:25:26 PM	Helium MFC set to  0.000000
4/11/2011	11:25:26 PM	H2 MFC set to  0.000000
4/11/2011	11:25:26 PM	BCl3 MFC set to  0.000000
4/11/2011	11:25:26 PM	PHl3 MFC set to  0.000000
4/11/2011	11:25:26 PM	SiCl4 MFC set to  0.000000
4/11/2011	11:25:26 PM	Bypass solenoid MFC set to  0.000000
4/11/2011	11:25:26 PM	Tube furnace set to 0
4/11/2011	11:25:26 PM	Run finished at 11:25 PM
4/11/2011	11:25:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
